MKS RevolutionIII AX-7695

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添加时间: 2017-03-01 15:51:00
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R*evolution   III AX7695
Gas   Supply
Ignition100%   O2 or Ar, or   90% O2/10% N2
ProcessUp   to 6.0 slm of 100% O2,   or 90% O2/10% N2
Operating   Pressure
Ignition0.5   to 2.0 Torr @ 1.0 to 6.0 slm
(pressure measured at R*evolution III outlet)
Process0.5   to 2.0 Torr @ 1.0 to 6.0 slm
Duty Cycle100%
InterlocksInternal   thermal switch and internal water flow switch to protect against insufficient   cooling
Wetted Materials6061-T6   Aluminum, Kalrez®, SiO2, 316L SS, Nickel, Fluorosilicone
Control InterfaceDiscrete   I/O, 9 and 25 pin D connectors, RS-232, DeviceNet™ and Ethernet (MKS   TOOLweb®-enabled)
InputsPlasma   On/Off
Power Set
OutputsReady
AC line
Plasma On
Power Monitor
UtilitiesPower   180 to 228 VAC, 50/60 Hz, 30A, 3 phase
Cooling water 1.75 gpm, < 30°C
Ambient 40°C max.
Weight85   lb. (38.6 Kg)
Dimensions15.7   inches long, 13.7 inches wide, 12.14 inches high
(399mm x 348mm x 308mm nominal)
ComplianceSemi   S2-0703 (includes S8, S10) 
CE EMC (EN55011, EN61326)
NRTL (UL 61010A-1, CSA 22.2 No. 1010.1)
Semi F47-0200 Voltage Sag Immunity


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