RPS Test Platform & Workshop
1.Perfect hard anodize technology for plasma block recoating.
2.RPS/RPSC Test Simulator Platform.
3.IntegrationTechnology Team for RPSC Repair.
4.Sanity Spare Parts Management and perfection overhaul SOP.
5.Standard Quality Verification.
Remote Plasma Source Service
1.AE/MKS RPS Repair Service.
2.RPS/RPSC Recoating Block Service.
3.RPS/RPSC Overhaul Service.
4.RPS/RPSC Repair PCB Service.
5.RPS/RPSC Test Service.
Repair RPSC Flow Chart
Remote Plasma Source Unit
SUPPLY | TYPE | TYPE NAME | TYPE NUMBER | USER VENDOR |
AE | 6KW | Rapid-F | 3151801-004 | AMT/AKT |
AE | 8KW | Xstream | 3151806-202f | AMT/AKT |
MKS | 2L | astron W | FI20620-1(5KW) | AMT/AKT |
MKS | 2L | astron W | AX7635(3KW) | AMT |
MKS | 3L | astron I | 7670/1/21 | AMT/NVLS |
MKS | 6L | astron E | FI80130 | AMT |
MKS | 6L | astron EX | FI80131 | AKT |
MKS | 8L | astron EX | FI80132 | AKT |
MKS | 15L | astron-hf | FI80146 | AKT |
MKS | 15L | astron-hf-s | AX7645 | NVLS |
MKS | 22L | astron-hf+ | FI7635 | AKT |
MKS | 30L | astron-hf++ | AX7665 | AKT |
为客户提供可靠的RF,DC,MATCH,RPS等备品备件。