RPS Test Platform & Workshop

1.Perfect hard anodize technology for plasma block recoating.

2.RPS/RPSC Test Simulator Platform.

3.IntegrationTechnology Team for RPSC Repair.

4.Sanity Spare Parts Management and perfection overhaul SOP.

5.Standard Quality Verification.

Remote Plasma Source Service

1.AE/MKS RPS Repair Service.

2.RPS/RPSC Recoating Block Service.

3.RPS/RPSC Overhaul Service.

4.RPS/RPSC Repair PCB Service.

5.RPS/RPSC  Test Service.

Repair RPSC  Flow Chart

Remote Plasma Source Unit